ISSN:
0032-3888
Keywords:
Chemistry
;
Chemical Engineering
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
A simple empirical relationship exists between the thickness and the solvent-evaporation rate of spin-coated thin films. The thickness of a film formed from an organic solvent solution can be approximated by the relationship\documentclass{article}\pagestyle{empty}\begin{document}$ D = K_0 \mu ^{0.36} \omega ^{ - 0.50} (E\lambda /C_p)^{0.60} $\end{document}, where μ is the viscosity of the coating solution, ω is the rotation speed, E is the solvent-evaporation rate, λ is the latent heat of evaporation, Cp is the heat capacity of the solvent, and K0 is a constant for volatile organic solvents. A similar relationship for aqueous polymer solutions is\documentclass{article}\pagestyle{empty}\begin{document}$ D = K_0 \mu ^{0.36} \omega ^{ - 0.50} (1.0 - RH)^{0.60} $\end{document}, where RH is the relative humidity of air around the spin coater and Ka is a constant for aqueous solutions. These relationships are helpful in understanding the mechanism of thin-film formation in spin coating.
Additional Material:
6 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/pen.760230706
Permalink