ISSN:
1089-7550
Quelle:
AIP Digital Archive
Thema:
Physik
Notizen:
When a chalcogenide glass film of composition As10Ge22.5Se67.5 is sensitized with evaporated silver selenide and is exposed to an electron beam, it is suggested that, as is the case for photodoping, silver will migrate from the unexposed region into the exposed one. This results in different silver distributions in the exposed regions. The distribution has been found, for the first time, to depend on various factors other than dosage, namely, the thicknesses of sensitized layers and glass films, and the size of the exposed region. Moreover, the form of the distribution is affected by the thickness of the sensitized layer but not that of the glass film, while it is not the thickness of the sensitized layer but that of the glass film which has an effect on the rate of change of silver concentration at the periphery or at the center versus dosage. By considering the amount of silver selenide remaining on the top of the exposed region, and by further assuming that silver diffusivity in the doped region is small when its concentration is low and that it will increase as the concentration is sufficiently large, one may be able to qualitatively explain the dependence of the distribution on the thickness of the sensitized layer.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1063/1.341275
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