ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
The x-ray-diffraction results reported here are from the first high-resolution triple-crystal experiments to be performed at the Australian National Beamline Facility at the Photon Factory. The heart of the facility is a multipurpose two-axis high-resolution vacuum diffractometer (BIGDIFF) Z. Barnea et al., Rev. Sci. Instrum. 63, 1069 (1992) capable of use for high-resolution powder diffraction (using both conventional scintillation detectors and imaging plates), protein crystallography, reflectometry, as well as single-crystal diffractometry. The present experiments were conducted on BIGDIFF in triple-crystal diffraction mode with a monolithic channel-cut Si monochromator (supplied by Professor M. Hart), a single-crystal Si sample, and a four-reflection monolithic channel-cut Si analyzer crystal. The Si(111) sample is a part of a wafer which had been implanted with 100 keV B+ ions (doses 1×1015 and 5×1015 cm−2) through a one-dimensional 0.5 μm thick oxide strip pattern with a 5.83 μm period and 4 μm open region. The triple-crystal data were collected in the form of two-dimensional intensity maps in the vicinity of the 111 Bragg peak, varying the sample rotation (ω) and the analyzer/scintillation detector rotation (2θ). The first results were collected in air both with the as-described sample and after the oxide layer had been removed. Certain slice scans (one-dimensional sections of the two-dimensional intensity maps) were also collected with a vacuum of 1 Torr and reveal considerable improvement in signal to background.The data will be compared with a recent similar study A. Yu. Nikulin et al., J. Appl. Cryst. 27, 338 (1994) performed on BL-14B at the Photon Factory. The new data collected in air indicate that lattice distortion may be mapped with a resolution of approximately 160 A(ring), to a depth of approximately 1.0 μm, providing valuable quantitative information on ion diffusion in such implanted materials. The slice scans collected in vacuum indicate that a depth resolution of 50 A(ring) is certainly achievable using BIGDIFF. The data show the excellent potential of BIGDIFF for extremely good signal to noise and very high resolution in such experiments, and the advantages of working entirely in vacuum. © 1995 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1145947
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