Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
68 (1996), S. 2020-2022
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
We have combined silicon micromachining technology with planar circuits to fabricate room-temperature niobium microbolometers for millimeter-wave detection. In this type of detector, a thin niobium film, with a dimension much smaller than the wavelength and fabricated on a 1 μm thick Si3N4 membrane, acts both as a radiation absorber and temperature sensor. Incident radiation is coupled into the microbolometer by a 0.37λ dipole antenna of center frequency 95 GHz with a 3 dB bandwidth of 15%, which is impedance matched with the Nb film. An electrical noise equivalent power (NEP) of 4.5×10−10 W/(square root of)Hz has been achieved. This is comparable to the best commercial room-temperature millimeter-wave detectors. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.115624
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