ISSN:
1432-0630
Keywords:
PACS: 68.35.BS; 81.15.Hi; 68.60.Dv
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
1-x Snx (0.01≤x≤0.04) layers on Si(001) and relaxed Si-Ge substrates. The Si1-xSnx layers were investigated using Rutherford backscattering spectrometry, atomic force microscopy, transmission electron microscopy and preferential-etching experiments. The investigation of surfactant-mediated growth of epitaxial Si1-xSnx was motivated by a possible use of relatively higher growth temperatures without relaxation by surface precipitation. It is demonstrated that higher growth temperatures are attainable when Bi is used as surfactant if the surface-segregated Sn layer is relatively small, equivalent to Si1-xSnx layers of low strain. The increase in growth temperature leads to a significant improvement in the crystalline quality of these Si1-xSnx layers.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s003390050885
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