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  • 1
    Book
    Book
    Geneva [u.a.] : Wiley & Sons and Orbisphere Laboratories
    Keywords: Flüssigkeit ; Messung ; Sauerstoffkonzentration ; Gewässer ; Sauerstoff ; Messung ; Sauerstoff ; Wasser ; Messung
    Type of Medium: Book
    Pages: XVI, 255 S. , Ill., graph. Darst
    ISBN: 0471038857
    Series Statement: Chemical analysis 49
    DDC: 546/.721/5483
    RVK:
    Language: English
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  • 2
    Description / Table of Contents: A comprehensive overview on the key aspects of chemical vapour deposition processes written by practising CVD technologists who are also leading international experts, Chemical Vapour Deposition (CVD) involves the deposition of thin solid films from chemical precursors in the vapour phase, and encompasses a variety of deposition techniques, including a range of thermal processes, plasma enhanced CVD (PECVD), photon- initiated CVD, and atomic layer deposition (ALD). The development of CVD technology owes a great deal to collaboration between different scientific disciplines such as chemistry, physics, materials science, engineering and microelectronics, and the publication of this book will promote and stimulate continued dialogue between scientists from these different research areas. The book is one of the most comprehensive overviews ever written on the key aspects of chemical vapour deposition processes and it is more comprehensive, technically detailed and up-to-date than other books on CVD. The contributing authors are all practising CVD technologists and are leading international experts in the field of CVD. It presents a logical and progressive overview of the various aspects of CVD processes. Basic concepts, such as the various types of CVD processes, the design of CVD reactors, reaction modelling and CVD precursor chemistry are covered in the first few chapters. Then follows a detailed description of the use of a variety CVD techniques to deposit a wide range of materials, including semiconductors, metals, metal oxides and nitrides, protective coatings and functional coatings on glass. Finally and uniquely, for a technical volume, industrial and commercial aspects of CVD are also discussed together with possible future trends, which is an unusual, but very important aspect of the book. The book has been written with CVD practitioners in mind, such as the chemist who wishes to learn more about CVD processes, or the CVD technologist who wishes to gain an increased knowledge of precursor chemistry. The volume will prove particularly useful to those who have recently entered the field, and it will also make a valuable contribution to chemistry and materials science lecture courses at undergraduate and postgraduate level
    Type of Medium: Online Resource
    Pages: 600 p , Online-Ressource , 202 b&w, ill
    Edition: RSC eBook Collection 1968-2009
    Language: English
    Note: Ebook , An overview of CVD processes, CVD reactors and delivery systems, Modeling CVD processes, ALD processes, Basic chemistry of CVD precursors, MOCVD of III-V semiconductors, MOCVD of II-VI semiconductors, CVD of metals, CVD of oxides used in microelectronics, CVD of metal nitride films, CVD of functional coatings on glass, CVD of optical coatings, CVD of hard protective coatings, Photon-assisted MOCVD processes, Plasma-assisted MOCVD processes, Commercial aspects of CVD.
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  • 3
    Electronic Resource
    Electronic Resource
    s.l. ; Stafa-Zurich, Switzerland
    Advances in science and technology Vol. 45 (Oct. 2006), p. 1173-1177 
    ISSN: 1662-0356
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Natural Sciences in General , Technology
    Notes: This review gives an overview of the characteristics of various non-thermal, nonequilibriumplasmas and outlines results of AP-PECVD with dielectric barrier discharges
    Type of Medium: Electronic Resource
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  • 4
    Electronic Resource
    Electronic Resource
    Springer
    Journal of applied electrochemistry 16 (1986), S. 781-785 
    ISSN: 1572-8838
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology , Electrical Engineering, Measurement and Control Technology
    Type of Medium: Electronic Resource
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  • 5
    ISSN: 1057-9257
    Keywords: remote PECVD ; silane ; nitrogen ; silicon nitride ; argon dilution ; hydrogen content ; stoichiometry ; Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Electrical Engineering, Measurement and Control Technology , Physics
    Notes: In Part I we reported the results of an emission spectroscopic study of the plasma obtained in an SiH4-N2-Ar mixture. It was shown that argon in metastable electronic excited states provides a high concentration of atomic nitrogen. In this part we report the results of a study of the influence of argon dilution on the growth rate, composition and properties of silicon nitride films. The exact influence of nitrogen dilution with argon depends on the process parameters and on the method of coupling of the RF power, but it is found in general that a high concentration of atomic nitrogen leads to changes in the relative amounts of Si-Hj and N-Hi bonds and in the Si/N ratio of deposited films. In particular, it is shown that hydrogen incorporation can be reduced and improved stoichiometry can be obtained. © 1998 John Wiley & Sons, Ltd.
    Additional Material: 8 Ill.
    Type of Medium: Electronic Resource
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  • 6
    Electronic Resource
    Electronic Resource
    New York, NY [u.a.] : Wiley-Blackwell
    Advanced Materials for Optics and Electronics 2 (1993), S. 123-132 
    ISSN: 1057-9257
    Keywords: Polysilicon ; Crystallinity ; Boron-doped ; LPCVD ; In situ doping ; Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Electrical Engineering, Measurement and Control Technology , Physics
    Notes: Results are presented for the degree of crystallinity, determined by Raman spectroscopy, of in situ B-doped LPCVD polysilicon as a function of deposition temperature. The results are compared with those reported in the literature for P-doped polysilicon and it is found that for B doping full crystallinity of the layer is achieved at a significantly lower deposition temperature than is required for P doping. An attempt to understand this effect is made in terms of a quantitative model which allows an estimation of values for silicon self-diffusivity and which is in accord with the experimental observations.
    Additional Material: 4 Ill.
    Type of Medium: Electronic Resource
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  • 7
    ISSN: 1057-9257
    Keywords: barium ; volatile ; β-diketone ; X-ray structure ; Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Electrical Engineering, Measurement and Control Technology , Physics
    Notes: At 150 K [Ba(TDFND)2, tetraglyme] crystallises in the P1/c space group with a = 17.15(2) Å b = 10.735(5) Å, c = 22.830(7) A, β = 97.56 (7)°, V = 4165 (5) Å3, Z=4. R1 = 0.0435, wR2 = 0.1079. The barium atom is nine-co-ordinate, with binding to all the O atoms. The two BaTDFND rings are planar but tilted by 26° from being co-planar. The five O atoms of the tetraglyme ligand are also essentially co-planar, but this plane subtends angles of 88.8(1)° and 67.4(1)° to the two BaTDFND planes. The Ba—O (TDFND) bond lengths are longer than for other related compounds, but the Ba—O (tetraglyme) bond lengths are similar to those in [Ba(HFA)2.tetraglyme] (HFA ≡ CF3C(O)CHC(O)CF3). The low melting point and the fact that [Ba(TDFND)2.tetraglyme], alone of barium complexes of this kind, can be evaporated without decomposition at 1 atm are attributed to lower intermolecular forces for this compound and to its greater thermal stability.
    Additional Material: 3 Ill.
    Type of Medium: Electronic Resource
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  • 8
    ISSN: 1057-9257
    Keywords: High Tc superconductors ; Precursors ; Copper ; Calcium ; Barium ; Yttrium ; Strontium ; Fluorinated β-dikeonates ; Ethanol ; Tetradecafluorononanedione ; Decafluoroheptanedione ; Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Electrical Engineering, Measurement and Control Technology , Physics
    Notes: The new β-diketone 1,1,1,2,2,3,3,7,7,8,8,9,9,9-tetradecafluorononane-4,6-dione (HTDFND) has been prepared and employed in the formation of complexes of Cu, Ca, Sr, Ba and Y. Complexes of the same metals derived from the β-diketone 1,1,1,2,2,3,3,7,7,7-decafluoroheptane-2,4-dione (HDFHD) have also been prepared. In general the compounds have the formula [M(TDFND)2H2O] or [M(DHFD)2H2O], although the yttrium complexes are [Y(β-diket)3] · xH2O (β-diket ≡ TDFND (x = 3) or DFHD (x = 2)). The complexes have been characterised by analytical and spectroscopic means and by a crystal structure of [Cu(TDFND)2EtOH] obtained by recrystallisation of [Cu(TDFND)2H2O] from aqueous ethanol. Crystal data for [Cu(TDFND)2EtOH]: triclinic, P̄1, a = 11.249(4) Å, b = 12.331 (2) Å, c = 12.890(2) Å, α = 96.89(2)°, β = 108.93(3)°, γ = 109.63(3)°, V = 1541.54 Å3, Z = 2. The complex is square pyramidal with the four oxygen atoms of the β-diketonates occupying the basal sites and the oxygen atom of the co-ordinated ethanol molecule in the apical position. The C3F7 ligands take up an extended staggered configuration in order to minimise steric repulsions. The complex is monomeric with intermolecular distances all greater than 4 Å. Simultaneous thermal analysis at 1 atm reveals that all the compounds lose water but then sublime, usually completely without decomposition. [Ba(TDFND)2H2O] is the first barium complex for which this is the case and it can be dehydrated to give [Ba(TDFND)2], which is also volatile but becomes less volatile with time. [Ba(TDFND)2H2O], [Sr(TDFND)2H2O] and [Ca(DFHD)2H2O] are suitable precursors for the growth of MF2 on silicon substrates. Complete orientation in the (111) direction is observed. Changes in the film growth rate with time for all the precursors are attributed to sample decomposition ([M(DFHD)2H2O], M ≡ Ca or Sr) or to slow reorganisation of the crystal structure ([Ba(TDFND)2H2O]). Layers with Y:Ba:Cu ratios close to the required 1:2:3 have been grown using [Y(DPM)3], [Cu(DPM)2] and [Ba(DFHD)2H2O] (DPM ≡ 2,2,6,6-tetramethylheptane-3,5-dionato).
    Additional Material: 6 Ill.
    Type of Medium: Electronic Resource
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  • 9
    Electronic Resource
    Electronic Resource
    New York, NY [u.a.] : Wiley-Blackwell
    Advanced Materials for Optics and Electronics 2 (1993), S. 301-312 
    ISSN: 1057-9257
    Keywords: Remote PECVD ; Capacitive coupling ; Silane ; Nitrogen ; Silicon nitride ; Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Electrical Engineering, Measurement and Control Technology , Physics
    Notes: In this paper we describe the growth of silicon nitride from nitrogen and silane for the first time by capacitively coupled remote PECVD. We report on the effect of process parameters on the composition and properties of the deposited films and we show that by adjustment of these parameters it is possible to produce high-quality material which could be of interest for electronic applications. Of particular note is that the growth rate is about one order of magnitude higher than any previously reported for nitride growth with remote PECVD using molecular nitrogen as the nitrogen source. We also discuss the mechanism of growth and propose that electron excitation of nitrogen and silane occurs in the gas phase, producing SiHx species which are adsorbed on the growing surface. The nitrogen is then incorporated into the layer by heterogeneous reaction.
    Additional Material: 8 Ill.
    Type of Medium: Electronic Resource
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  • 10
    Electronic Resource
    Electronic Resource
    Weinheim : Wiley-Blackwell
    Electroanalysis 8 (1996), S. 263-266 
    ISSN: 1040-0397
    Keywords: Electroactive polymer ; pH response ; Glucose oxidase ; Potentiometry ; Glucose determination ; Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology
    Notes: A new concept is described for monitoring a biomolecule with a sensor having an enzyme entrapped in a conducting polymer. This is based on the sensitivity of the electroactive polymer itself to changes of pH in solution. The concept has been investigated for a glucose sensor with glucose oxidase (GOD) immobilized in a polypyrrole (PPy) layer on an inert platinum electrode. Measurements with a Pt/PPy/GOD electrode for glucose concentrations in the physiological range gave a linear correlation with logarithm of concentration over one decade with a satisfactory dynamic response. There was practically no change of slope or range of linear response to glucose after several days of use; this was in contrast to the amperometric response of the detector when there was about a 50% loss of sensitivity.
    Additional Material: 5 Ill.
    Type of Medium: Electronic Resource
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