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Effect of preoxidation on deposition of thin gate-quality silicon oxide film at low temperature by using a sputter-type electron cyclotron resonance plasma (1997)

Gao, D. W. ; Kashiwazaki, Y. ; Muraoka, K.

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 82 (1997), S. 5680-5685

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ISSN: 1089-7550

Quelle: AIP Digital Archive

Thema: Physik

Notizen: We have studied a method of combining preoxidation and subsequent sputter deposition for fabricating Si oxide films with a thickness of less than 10 nm at low temperature by using a sputter-type electron cyclotron resonance plasma system. As a key process to achieving high quality composite oxide structures, plasma preoxidation was investigated under different gas flow rates at a substrate temperature of 130 °C. The optimum conditions for the preoxidation were clarified. The structural properties of Si oxide formed by this method with the preoxidation were characterized and compared with those of Si oxide which was directly sputtered without a preoxidation step. It was found that the method with the preoxidation provided a useful way of establishing an abrupt Si/SiO2 interface region and achieving films which have a lower network disorder degree. This procedure was then followed by a thermal annealing in Ar ambient at 450 °C. A thin Si oxide film was produced with a fixed charge density of less than 1.0×1011 cm−2. 98% of the detected samples had a breakdown field of greater than 8 MV/cm. These properties essentially match the electrical quality of thermally grown Si oxide. In contrast, the oxide film deposited without a preoxidation step showed much poorer electrical properties as only 28% of the samples had a breakdown field of greater than 8 MV/cm. Also, the film showed a higher fixed charge density of 1.0×1012 cm−2. The effects of the preoxide on structural and electrical properties of deposited oxide films are discussed in detail. © 1997 American Institute of Physics.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.366431

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Digitale Medien

[Ni(C10H8N2)3]2[V4O12].11H2O (1998)

Yang, G. Y. ; Gao, D. W. ; Chen, Y. ; [weitere]

Oxford [u.a.] : International Union of Crystallography (IUCr)

Acta crystallographica 54 (1998), S. 616-618

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ISSN: 1600-5759

Quelle: Crystallography Journals Online : IUCR Backfile Archive 1948-2001

Thema: Chemie und Pharmazie , Geologie und Paläontologie , Physik

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1107/S0108270197018751

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In Vivo Differentiation of Complementary Contrast Media at Dual-Energy CT [Technical Developments] (2012)

Mongan, J., Rathnayake, S., Fu, Y., Wang, R., Jones, E. F., Gao, D.-W., Yeh, B. M.

The Radiological Society of North America (RSNA)

In: Radiology

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Publikationsdatum: 2012-09-20

Beschreibung: Purpose: To evaluate the feasibility of using a commercially available clinical dual-energy computed tomographic (CT) scanner to differentiate the in vivo enhancement due to two simultaneously administered contrast media with complementary x-ray attenuation ratios. Materials and Methods: Approval from the institutional animal care and use committee was obtained, and National Institutes of Health guidelines for the care and use of laboratory animals were observed. Dual-energy CT was performed in a set of iodine and tungsten solution phantoms and in a rabbit in which iodinated intravenous and bismuth subsalicylate oral contrast media were administered. In addition, a second rabbit was studied after intravenous administration of iodinated and tungsten cluster contrast media. Images were processed to produce virtual monochromatic images that simulated the appearance of conventional single-energy scans, as well as material decomposition images that separate the attenuation due to each contrast medium. Results: Clear separation of each of the contrast media pairs was seen in the phantom and in both in vivo animal models. Separation of bowel lumen from vascular contrast medium allowed visualization of bowel wall enhancement that was obscured by intraluminal bowel contrast medium on conventional CT scans. Separation of two vascular contrast media in different vascular phases enabled acquisition of a perfectly coregistered CT angiogram and venous phase–enhanced CT scan simultaneously in a single examination. Conclusion: Commercially available clinical dual-energy CT scanners can help differentiate the enhancement of selected pairs of complementary contrast media in vivo. © RSNA, 2012

Schlagwort(e): Computed Tomography

Print ISSN: 0033-8419

Digitale ISSN: 1527-1315

Thema: Medizin

Publiziert von The Radiological Society of North America (RSNA)

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Extravasated Contrast Material in Penetrating Abdominopelvic Trauma: Dual-Contrast Dual-Energy CT for Improved Diagnosis--Preliminary Results in an Animal Model [Experimental Studies] (2013)

Mongan, J., Rathnayake, S., Fu, Y., Gao, D.-W., Yeh, B. M.

The Radiological Society of North America (RSNA)

In: Radiology

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Publikationsdatum: 2013-08-23

Beschreibung: Purpose: To compare the diagnostic performance of dual-energy (DE) computed tomography (CT) with two simultaneously administered contrast agents (hereafter, dual contrast) with that of conventional CT in the evaluation of the presence and source of extravasation in penetrating abdominopelvic trauma. Materials and Methods: Institutional animal care and use committee approval was obtained, and the study was performed in accordance with National Institutes of Health guidelines for the care and use of laboratory animals. Five rabbits with bowel trauma, vascular penetrating trauma, or both were imaged with simultaneous iodinated intravenous and bismuth subsalicylate enteric contrast material at DE CT. Four attending radiologists and six radiology residents without prior DE CT experience each evaluated 10 extraluminal collections to identify the vascular and/or enteric origin of extravasation and assess their level of diagnostic confidence, first with virtual monochromatic images simulating conventional CT and then with DE CT material decomposition attenuation maps. Results: Overall accuracy of identification of source of extravasation increased from 78% with conventional CT to 92% with DE CT (157 of 200 diagnoses vs 184 of 200 diagnoses, respectively; P 〈 .001). Nine radiologists were more accurate with DE CT; one had no change. Mean confidence increased from 67% to 81% with DE CT ( P 〈 .001). Conclusion: In a rabbit abdominopelvic trauma model, dual-contrast DE CT significantly increased accuracy and confidence in the diagnosis of vascular versus enteric extravasated contrast material. © RSNA, 2013

Schlagwort(e): Gastrointestinal Radiology

Print ISSN: 0033-8419

Digitale ISSN: 1527-1315

Thema: Medizin

Publiziert von The Radiological Society of North America (RSNA)

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