Publication Date:
2016-03-17
Description:
Neutral temperature T g in capacitively coupled argon plasmas was measured by using a fiber Bragg grating sensor. The measurement of T g is based on the thermal equilibrium process between the sensor and neutral gases, which is found to become fast upon increasing pressure, due to enhanced heat conduction. Additionally, T g was found to increase with increasing high frequency power due to enhancive collisions with charged particles. It is also observed that T g exhibits a significant gradient in space, ranging from 10 to 120 °C higher than room temperature for the conditions investigated. In addition, the spatial profiles of T g at different pressures generally resemble those of the Ar + density n i , measured with a floating double probe. The neutral gas is mainly heated via elastic collisions with ions in the sheath region followed by heat conduction among neutrals.
Print ISSN:
0021-8979
Electronic ISSN:
1089-7550
Topics:
Physics
Permalink