Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
58 (1991), S. 905-907
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Thermal stability of PtSi contact to epitaxial Ge0.5Si0.5/(100)Si has been investigated. The PtSi layer remained structurally and morphologically intact on the epitaxial Ge-Si alloy at temperatures around 650 °C. When annealed at higher temperatures, PtSi penetrated locally into the alloy, although no chemical reaction was observed. The observed stability of PtSi is explained on the basis of a ternary Pt-Ge-Si equilibrium phase diagram. Other choices of contact compounds on Ge-Si alloys are also discussed.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.104472
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