Keywords:
Physics -- Methodology.
;
Vacuum.
;
Vacuum technology.
;
Electronic books.
Description / Table of Contents:
Vacuum Physics and Technology.
Type of Medium:
Online Resource
Pages:
1 online resource (619 pages)
Edition:
1st ed.
ISBN:
9780080859958
Series Statement:
Issn Series ; v.Volume 14
URL:
https://ebookcentral.proquest.com/lib/geomar/detail.action?docID=421064
DDC:
533.5
Language:
English
Note:
Front Cover -- Vacuum Physics and Technology -- Copyright Page -- Contents -- Contributors -- Foreword -- Preface -- Chapter 1. Introduction -- 1.1. Survey -- 1.2. Basic Equations -- 1.3. Molecular Transport -- 1.4. Surface Physics -- Chapter 2. Measurement of Total Pressure in Vacuum Systems -- 2.1. Introduction -- 2.2. Manometers -- 2.3. Thermal Conductivity Gauges -- 2.4. Ionization Gauges -- 2.5. Placement and Calibration of Gauges -- Chapter 3. Partial Pressure Measurement -- 3.1. Mass Spectrometer -- Chapter 4. Production of High Vacua -- 4.1. Overview and Formulation of General Requirements -- 4.2. Fore-Vacuum Pumps -- 4.3. Diffusion Pumps -- 4.4. Other High Vacuum Pumps -- Chapter 5. Production of Ultrahigh Vacuum -- 5.1. Fundamental Concepts in the Production of Ultrahigh Vacuum -- 5.2. Getter Pumping -- 5.3. Ion Pumps -- 5.4. Cryogenic Pumping -- 5.5. Turbomolecular Vacuum Pumps -- Chapter 6. Metal Vacuum Systems and Components -- 6.1. A Diffusion Pumped Vacuum System and Its Schematic Representation -- 6.2. Vacuum Flanges -- 6.3. Vacuum, Water, and Gas Connectors: Function and Choices -- 6.4. Vacuum Valves -- 6.5. Traps, Baffles, and Valves in Combination -- 6.6. Flexible Connectors -- 6.7. Mechanical Motion Feedthroughs -- 6.8. Electrical Feedthroughs -- 6.9. Viewports -- Chapter 7. Glass Vacuum Systems -- 7.1. Use of Glass as the Vacuum Envelope -- 7.2. Systems and Components -- 7.3. Outgassing of Glass -- 7.4. Gas Permeation in Glass -- Chapter 8. Properties of Materials Used in Vacuum Technology -- 8.1. Introduction -- 8.2. Metals and Metal Alloys -- 8.3. Glasses -- 8.4. Ceramics -- 8.5. Elastomers and Plastomers -- 8.6. Sealants, Waxes, Greases, and Oils -- 8.7. Gases-Preparation, Properties, and Uses -- 8.8. Conclusion -- Chapter 9. Guidelines for the Fabrication of Vacuum Systems and Components -- 9.1. Soft Soldering.
,
9.2. Hard Soldering -- 9.3. Welding -- 9.4. Bakeable and Coolable Vacuum Joints -- 9.5. Cleaning Techniques -- Chapter 10. Protective Devices for Vacuum Systems -- 10.1. Safety Considerations and Protective Devices -- 10.2. Interlocks and System Protective Devices -- Chapter 11. Design of High Vacuum Systems -- 11.1. General Considerations -- 11.2. Metal Systems -- Chapter 12. Operating and Maintaining High Vacuum Systems -- 12.1. General Considerations -- 12.2. High Vacuum Valve Control -- 12.3. Mechanical Pumps -- 12.4. Diffusion Pump Maintenance -- Chapter 13. Design and Performance of Bakeable Ultrahigh Vacuum Systems -- 13.1. Small Glass Uhv Systems -- 13.2. Small "All Metal" Uhv Systems -- 13.3. Intermediate Size Uhv Systems -- 13.4. Large Uhv Systems -- Chapter 14. Special Requirements in the Design, Operation, and Maintenance of Ultrahigh Vacuum Systems -- 14.1. Bakeout of Uhv Systems: Theory and Practice -- 14.2. Routine Maintenance and Cleaning -- Chapter 15. The Fine Art of Leak Detection and Repair -- 15.1. Basic Considerations -- 15.2. Types of Leak Detecting Equipment -- 15.3. Special Techniques and Problems -- 15.4. Repair Techniques -- Chapter 16. Vacuum Deposition Techniques -- 16.1 Introduction -- 16.2. Vacuum Evaporation Techniques -- 16.3. Vacuum Sputter Deposition -- 16.4. Comparison of Vacuum Evaporation and Sputtering Techniques -- Subject Index.
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