In:
Optics and Precision Engineering, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 23, No. 12 ( 2015), p. 3422-3429
Materialart:
Online-Ressource
ISSN:
1004-924X
Originaltitel:
基于正交与插值算法的精密抛光平台综合误差建模与补偿
DOI:
10.3788/OPE./2015/23/12
DOI:
10.3788/OPE.20152312.3422
Sprache:
Englisch
,
Chinesisch
Verlag:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Publikationsdatum:
2015
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