In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 33, No. 8R ( 1994-08-01), p. 4782-
Abstract:
Discharge characteristics and extracted ion beam energy distributions of a Hall-accelerator-type ion source for low-voltage continuous operation (HALOC) with He, H 2 , CH 4 , Ar and O 2 gases have been studied, and discussed in terms of gas species, electron scattering cross section (total cross section) of ions, electron mean free time, cycloidal length, and the neutralization of ions in the extracted beam.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.33.4782
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1994
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
2006801-3
Permalink