In:
physica status solidi c, Wiley, Vol. 10, No. 11 ( 2013-11), p. 1445-1447
Abstract:
In this paper, we compare the performances of wet‐etched and dry‐etched Geiger‐mode avalanche photodiodes (GM‐APDs) using a single diffusion process at a wavelength of 1.55‐µm. The single‐diffused GM‐APD based on a wet recess‐etching has demonstrated the good performances of a dark count rate of 0.03 kHz/µm 2 and a photon detection efficiency of 17.1% at 240 K. (© 2013 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
Type of Medium:
Online Resource
ISSN:
1862-6351
,
1610-1642
DOI:
10.1002/pssc.201300178
Language:
English
Publisher:
Wiley
Publication Date:
2013
detail.hit.zdb_id:
2105580-4
detail.hit.zdb_id:
2102966-0
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