In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 36, No. 12S ( 1997-12-01), p. 7560-
Abstract:
In order to search for an appropriate material for an electron beam (EB) system to which in situ cleaning is applied, we investigated the particle generation due to the cleaning process and beam drift due to charging of the processed electrodes. In order to study the particle generation, we observed the change of surface morphologies of materials caused by the cleaning process. Particles are generated on the surfaces of Ag and BeCu. Particle generation is not observed on the surfaces of Ti, Cu, BeCu (Au-plated), Au, Al, Al (Au-plated), Al (Ni plated) and Pt. In order to study the charging effect, we measured the beam drift after cleaning the electrodes. The beam drift is small when Au and Ti electrodes are used and large when Ni plated electrodes are used. Therefore, Au and Ti are suitable materials for the EB system to which the in situ cleaning process is applied.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.36.7560
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1997
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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