In:
Optics and Precision Engineering, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 27, No. 7 ( 2019), p. 1536-1543
Type of Medium:
Online Resource
ISSN:
1004-924X
Uniform Title:
X-Y直线电机精密运动平台的轮廓误差主动补偿
DOI:
10.3788/OPE./2019/27/7
DOI:
10.3788/OPE.20192707.1536
Language:
English
,
Chinese
Publisher:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Publication Date:
2019
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