In:
Applied Physics Letters, AIP Publishing, Vol. 69, No. 2 ( 1996-07-08), p. 188-190
Abstract:
A hybrid technique is reported, which combines magnetron sputtering and pulsed laser ablation to produce plasma fluxes intersected on a substrate surface to form metal, ceramic and diamond-like materials. Deposition of crystalline Ti, TixCy, TiCN, and amorphous diamond-like carbon films at low temperatures by the new technique is discussed. The variation of laser pulse frequency is found to be a simple way to control film chemical composition. The technique can be used to prepare materials with transitional structure, as, for example, between metal carbides and diamond-like carbon.
Type of Medium:
Online Resource
ISSN:
0003-6951
,
1077-3118
Language:
English
Publisher:
AIP Publishing
Publication Date:
1996
detail.hit.zdb_id:
211245-0
detail.hit.zdb_id:
1469436-0
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