In:
Review of Scientific Instruments, AIP Publishing, Vol. 54, No. 2 ( 1983-02-01), p. 210-212
Kurzfassung:
An instrument measuring the temperature dependence of minority-carrier lifetimes without contacts is described. The temperature range is 100 to 420 K, and the shortest decay time observed is about 2 μs. The instrument utilizes the photo decay of microwave power reflected from the sample, therefore, it is a contactless method. As an example, the instrument was applied to high-quality silicon crystals used in very large scale integrated circuit fabrication. The measured temperature dependence could be explained by the Shockley–Read–Hall theory by assuming a level for the recombination centers at 0.18 eV from the valence band.
Materialart:
Online-Ressource
ISSN:
0034-6748
,
1089-7623
Sprache:
Englisch
Verlag:
AIP Publishing
Publikationsdatum:
1983
ZDB Id:
209865-9
ZDB Id:
1472905-2
SSG:
11
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