In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 36, No. 10R ( 1997-10-01), p. 6540-
Abstract:
A few years ago, the concept of magnetic neutral line discharge plasma was presented, and a preliminary experiment demonstrated its usefulness in plasma processing. Subsequently, the electron behavior was analyzed theoretically, and the possibility of a high energy gain of electrons due to meandering motion in the magnetic neutral loop under a rf induction field along the loop was revealed. Recently, evidence has been found that the stronger the applied rf power is, the easier is the thermalization of electrons. Here, the results of studying this dependence are reported and the reason for the dependence is presented.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.36.6540
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1997
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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