In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 33, No. 8R ( 1994-08-01), p. 4787-
Abstract:
An electron cyclotron resonance (ECR) ion source 8 cm in diameter using a reentrant coaxial cavity and a ring cusp magnetic field was developed to improve plasma uniformity and operational reliability. The reentrant coaxial cavity is utilized to achieve electrical breakdown easily, to tune in variable electromagnetic fields and to introduce microwaves into plasma from an annular window of a discharge chamber sidewall. Microwaves are resonantly absorbed by the ECR magnetic field. Above 10 sccm flow rate for Ar, uniform and overdense plasmas were obtained in an area 4 cm in diameter from the center axis. The maximum plasma density of 1.26×10 11 cm -3 was achieved on the center axis at 20 sccm. However, plasma densities for N 2 and O 2 were lower than the cutoff density. The maximum ion beam current density of 1.26 mA/cm 2 was obtained at a forward power of 304 W for Ar.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.33.4787
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1994
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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