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  • 1
    Online Resource
    Online Resource
    Sumart Processing Society for Minerals, Environment and Energy ; 2013
    In:  Journal of Smart Processing Vol. 2, No. 4 ( 2013), p. 144-151
    In: Journal of Smart Processing, Sumart Processing Society for Minerals, Environment and Energy, Vol. 2, No. 4 ( 2013), p. 144-151
    Type of Medium: Online Resource
    ISSN: 2186-702X
    Uniform Title: 高温領域まで拡張した高信頼SiCダイアタッチメント
    Language: English , Japanese
    Publisher: Sumart Processing Society for Minerals, Environment and Energy
    Publication Date: 2013
    detail.hit.zdb_id: 2939047-3
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  • 2
    Online Resource
    Online Resource
    Sumart Processing Society for Minerals, Environment and Energy ; 2014
    In:  Journal of Smart Processing Vol. 3, No. 4 ( 2014), p. 205-211
    In: Journal of Smart Processing, Sumart Processing Society for Minerals, Environment and Energy, Vol. 3, No. 4 ( 2014), p. 205-211
    Type of Medium: Online Resource
    ISSN: 2186-702X , 2187-1337
    Uniform Title: 高温動作SiC素子実装のための金系はんだの固相線温度制御技術
    Language: English , Japanese
    Publisher: Sumart Processing Society for Minerals, Environment and Energy
    Publication Date: 2014
    detail.hit.zdb_id: 2939047-3
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  • 3
    Online Resource
    Online Resource
    Sumart Processing Society for Minerals, Environment and Energy ; 2013
    In:  Journal of Smart Processing Vol. 2, No. 4 ( 2013), p. 152-159
    In: Journal of Smart Processing, Sumart Processing Society for Minerals, Environment and Energy, Vol. 2, No. 4 ( 2013), p. 152-159
    Type of Medium: Online Resource
    ISSN: 2186-702X
    Uniform Title: 200°C以上での SiC 駆動を想定したAl ワイヤーボンディング信頼性
    Language: English , Japanese
    Publisher: Sumart Processing Society for Minerals, Environment and Energy
    Publication Date: 2013
    detail.hit.zdb_id: 2939047-3
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  • 4
    Online Resource
    Online Resource
    The Electrochemical Society ; 2013
    In:  ECS Transactions Vol. 58, No. 4 ( 2013-08-31), p. 33-47
    In: ECS Transactions, The Electrochemical Society, Vol. 58, No. 4 ( 2013-08-31), p. 33-47
    Abstract: Packaging technology applicable to SiC power devices operated in an extended junction temperature range (Tjmax 〉 200°C) must be developed in order to create much more compact and cost-effective SiC power modules. This paper describes some of the technical challenges involved in improving the reliability of the critical package components—die attachment system, Al wire bonds and encapsulation—in direct contact with SiC devices inside the power module. Two numerical targets, (I) 3000 hours for a storage test at 250°C and (II) 3000 cycles for thermal cycling between -40°C and 250°C, were achieved through optimization and various improvements.
    Type of Medium: Online Resource
    ISSN: 1938-5862 , 1938-6737
    Language: Unknown
    Publisher: The Electrochemical Society
    Publication Date: 2013
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  • 5
    In: ECS Transactions, The Electrochemical Society, Vol. 86, No. 12 ( 2018-07-23), p. 107-112
    Type of Medium: Online Resource
    ISSN: 1938-6737 , 1938-5862
    Language: English
    Publisher: The Electrochemical Society
    Publication Date: 2018
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  • 6
    Online Resource
    Online Resource
    IMAPS - International Microelectronics Assembly and Packaging Society ; 2017
    In:  Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) Vol. 2017, No. HiTEN ( 2017-07-01), p. 000197-000200
    In: Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT), IMAPS - International Microelectronics Assembly and Packaging Society, Vol. 2017, No. HiTEN ( 2017-07-01), p. 000197-000200
    Abstract: We are developing SiC power module which can operate at high temperature. At present, SiC devices are attached by Au-Ge eutectic solder. In terms of cost, we are considering using Zn-Al solder instead of Au-Ge eutectic solder. For Zn-Al solder, joint reliability is reported for a small area bonding such as device connection. However, as far as we know, there is no report on the bonding reliability of large area such as base plate and substrate. Therefore, we report crack propagation by thermal cycle test on solder thickness.
    Type of Medium: Online Resource
    ISSN: 2380-4491
    Language: English
    Publisher: IMAPS - International Microelectronics Assembly and Packaging Society
    Publication Date: 2017
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  • 7
    Online Resource
    Online Resource
    The Electrochemical Society ; 2016
    In:  ECS Meeting Abstracts Vol. MA2016-02, No. 35 ( 2016-09-01), p. 2260-2260
    In: ECS Meeting Abstracts, The Electrochemical Society, Vol. MA2016-02, No. 35 ( 2016-09-01), p. 2260-2260
    Abstract: Introduction In this paper, we propose non-pressure soldering method during reflow process for Zn-Al solder by breaking oxide film on its surface in advance of heating. SiC power semiconductors can operate at a temperature of 200 °C or more. The temperature difference between junction of the semiconductors and ambient air makes effective heat dissipation, therefore the cooling system that occupies a large volume in an semiconductor power module can be minimized. If we use these advantages, we have to use high melting point solder such as Zn-Al alloy solder. But the solder, which is usually provided as preformed sheet, have stiff natural oxide film on its surface, therefore applying pressure to the preformed sheet during reflow process is necessary to break the oxide film for secure soldering. New proposed method don’t need these way. The reflow process becomes simplified. Method and Result Effectiveness of the joining method is described with Fig. 1. This figure shows fracture surfaces of samples after shear test. The samples are attempted to join a circuit pattern and a SiC dummy chip by soldering of Zn-Al preformed solder. The sample (a) is not given ultrasonic bonding before reflow. The preformed sheet of the sample (b) is attached to both the chip and the circuit pattern by ultrasonic bonding in advance of reflow. Then the two samples are heated in the same reflow process and evaluated based on shear test. As a result of the test, The chip of the sample (a) was easily peeled off. On the other hand, shear strength of (b) is 60.4 MPa on average. The reason of different results is described below. Since the natural oxide film was broken by ultrasonic bonding, and a newly formed surface is exposed, the solder and both the chip and the circuit pattern are mutually joined. When the sample is heated, the solder in the preformed sheet melts and overflows from the bonding surface. Therefore the chip and the circuit pattern are joined by soldering. Without breaking oxide film like (a) in advance of reflow, solder joint doesn’t occur. The proposed soldering method has a potential to be low-cost and simple process for packaging of SiC power semiconductors. Acknowledgment This work was supported by Council for Science, Technology and Innovation (CSTI), Cross-ministerial Strategic Innovation Promotion Program (SIP), "Next-generation power electronics/Consistent R & D of next-generation SiC power electronics", and "the Novel Semiconductor Power Electronics Project Realizing Low Carbon Emission Society" (funding agency: NEDO). Figure 1
    Type of Medium: Online Resource
    ISSN: 2151-2043
    Language: Unknown
    Publisher: The Electrochemical Society
    Publication Date: 2016
    detail.hit.zdb_id: 2438749-6
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  • 8
    Online Resource
    Online Resource
    The Electrochemical Society ; 2013
    In:  ECS Meeting Abstracts Vol. MA2013-02, No. 25 ( 2013-10-27), p. 1896-1896
    In: ECS Meeting Abstracts, The Electrochemical Society, Vol. MA2013-02, No. 25 ( 2013-10-27), p. 1896-1896
    Abstract: Abstract not Available.
    Type of Medium: Online Resource
    ISSN: 2151-2043
    Language: Unknown
    Publisher: The Electrochemical Society
    Publication Date: 2013
    detail.hit.zdb_id: 2438749-6
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  • 9
    In: ECS Meeting Abstracts, The Electrochemical Society, Vol. MA2015-02, No. 30 ( 2015-07-07), p. 1122-1122
    Abstract: 〈 Abstract 〉 Wide Band Gap (WBG) power semiconductors such as SiC and GaN are currently in the spotlight for realizing high power density converters. To derive their characteristics, one of the important issues of power module technology is high temperature operation. It is well known that a power module equipped with the WBG power semiconductors can operate in high T j (Junction Temperature) as over 200 degrees C. This device feature can achieve great improvements for downsizing of cooling system of converter compared with the conventional Si power device. However the conventional power module technologies are designed to be reliable up to T j =175 degrees C. Therefore, it is important to develop high temperature capable power module technologies which can operate in T j =250 degrees C. At this temperature, there are no standard assembly parts as solder, seal resin and ceramic. In addition, high temperature makes assembly process harder because of huge thermal stress. Furthermore, high temperature operation induces large thermal resistance failure after long-term thermal cycle test. Regarding this background, this study aims to investigate the coefficient of thermal expansion (CTE) mismatch behavior between the baseplate and the ceramic substrate at T j =250 degrees C. CTE mismatch causes thermal cycle reliability failure at the soldered joint between the baseplate and the ceramic substrate. Therefore, it is important to observe soldered joint condition during thermal cycle test. In particular, we conduct a series of verification tests in order to investigate the soldered joint crack propagation caused by CTE mismatch. In this test, the samples are shown in Fig. 1. The Cu-metalized Si 3 N 4 ceramic substrates are attached to the baseplates with Au–Ge solder. As the baseplate material, Al (pure aluminum) and Cu (oxygen-free copper) are selected which are used for the conventional power modules, in addition, SUS410 (chromium stainless steel) and W-Cu (89W–11Cu) that CTEs are similar to those of the Cu-metalized Si 3 N 4 ceramic substrate are selected. The samples undergo the thermal cycle load of –40 to 250 degrees C and the crack propagation of the soldered joint areas are observed by Scanning Acoustic Tomography (SAT). Fig. 2 shows SAT images of the joint areas and Fig. 3 shows the remaining joint area rate (= remaining joint area / initial joint area) as a function of the number of thermal cycles. Consequently, the smaller mismatch of CTE between the baseplate and the ceramic substrate contribute to less crack propagation of joint area in the case of Cu, SUS410, and W–Cu samples. On the other hand, the crack propagation of Al samples is unexpectedly small in spite of the largest CTE mismatch. The discussion of the result is as follows. It is well known that the dominant factor of the plastic deformation mechanism is grain boundary sliding not dislocation in the uniform temperature, T H = T/T m (absolute melting temperature), exceeds 0.4. Therefore, creep deformation easily occurs in the case. While Al’s 0.4 Tm is 100 degrees C, the other materials' are higher than 250 degrees C. Therefore, in particular, plastic deformation easily occurs for Al, compared with the other three materials in –40 to 250 degrees C. This implies that the Al baseplate plastic deformation caused by thermal stress of CTE mismatch ends up with the stress relief of the soldered joint. At the result of the thermal cycle load, the existence of a fine wavy deformation trace on the rear of the Al baseplate is observed as shown in Fig. 4. That should almost be equal in area to the soldered joint of the baseplate. This physical change implies that repetition plastic deformation should occur to the Al baseplate because the wavy trace is not shaped on the baseplates of the other three materials. In conclusion, we verify the effects of CTE mismatch between the baseplate and the ceramic substrate of the soldered joint in –40 to 250 degrees C. As the result, it is clarified that similar CTE between the baseplate and the ceramic substrate is important in order to realize long-term reliability. On the other hand, it is also clarified that the baseplate plastic deformation contributes to better thermal cycle capability even if the CTE mismatch is large. This study will contribute to realizing the power module which is able to operate in T j =250 degrees C. 〈 Acknowledgement 〉 This study was supported by the Council for Science, Technology and Innovation (CSTI), Cross-ministerial Strategic Innovation Promotion Program (SIP), “Next-generation power electronics/Consistent R & D of next-generation SiC power electronics” and “the Novel Semiconductor Power Electronics Project Realizing Low Carbon Emission Society” (funding agency: NEDO) Figure 1
    Type of Medium: Online Resource
    ISSN: 2151-2043
    Language: Unknown
    Publisher: The Electrochemical Society
    Publication Date: 2015
    detail.hit.zdb_id: 2438749-6
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  • 10
    Online Resource
    Online Resource
    The Electrochemical Society ; 2016
    In:  ECS Transactions Vol. 75, No. 12 ( 2016-08-23), p. 117-122
    In: ECS Transactions, The Electrochemical Society, Vol. 75, No. 12 ( 2016-08-23), p. 117-122
    Abstract: This paper reports joining technology for Zn-Al solder without pressure during reflow process. SiC power devices can operate at temperatures over 200 ºC. Taking the advantage of this benefit, the cooling system which occupies a large volume in an inverter can be downsized. However, high melting point solder is required, such as Zn-Al solder. This solder was needed to pressure during reflow process because Zn-Al solder preform has stiff natural oxide film on its surface. We propose a new process for breaking the oxide film and creating temporary joining by ultrasonic bonding. As the result, the solder can join other components without pressure during reflow.
    Type of Medium: Online Resource
    ISSN: 1938-5862 , 1938-6737
    Language: Unknown
    Publisher: The Electrochemical Society
    Publication Date: 2016
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