In:
Chinese Optics Letters, Shanghai Institute of Optics and Fine Mechanics, Vol. 14, No. 2 ( 2016), p. 021407-21410
Type of Medium:
Online Resource
ISSN:
1671-7694
Uniform Title:
Fabrication of grating structures on silicon carbide by femtosecond laser irradiation and wet etching
DOI:
10.3788/COL/2016/14/2
DOI:
10.3788/COL201614.021407
Language:
English
,
Chinese
Publisher:
Shanghai Institute of Optics and Fine Mechanics
Publication Date:
2016
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