In:
Journal of the Optical Society of America A, Optica Publishing Group, Vol. 39, No. 12 ( 2022-12-01), p. 2225-
Abstract:
The optical functions of anisotropic materials can be determined using
generalized ellipsometry, which can measure the cross-polarization coefficients (CPs) of the sample surface reflections. These CPs have
several symmetry relations with respect to the symmetry of the crystal. This paper explores the symmetry relations of these CPs for
uniaxial, orthorhombic, and monoclinic crystals and the requirements for generalized ellipsometry. Several ellipsometry measurement
configurations are examined, including the requirements for the accurate measurements of the dielectric functions of anisotropic
crystals.
Type of Medium:
Online Resource
ISSN:
1084-7529
,
1520-8532
DOI:
10.1364/JOSAA.471958
Language:
English
Publisher:
Optica Publishing Group
Publication Date:
2022
SSG:
24,1
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