In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 33, No. 7S ( 1994-07-01), p. 4316-
Abstract:
A variety of solid targets such as Al 2 O 3 , Si 3 N 4 , YBa 2 Cu 3 O x and polymers were ablated with an ArF or KrF excimer laser. Laser-induced fluorescence spectroscopy (LIF) was used to detect species ejected from ablated targets and to characterize their kinetic properties. An aluminum radical beam produced from Al 2 O 3 was applied to the measurement of the reactive cross section of Al with oxygen gas and to the study of the radical-surface interaction.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.33.4316
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1994
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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