In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 39, No. 5A ( 2000-05-01), p. L429-
Abstract:
m =0 standing helicon waves (SHWs) are used to produce high-density Ar plasmas, of the order of 10 13 cm -3 , in a bounded cylindrical plasma column. Axial mode number N =1, 3, and 5 ( N is the number of half-wavelengths in the plasma column) SHWs are strongly excited for plasma length L =10–26 cm with the rf power P rf ≤3.5 kW and external static magnetic field B 0 =237 G. Hollow and parabolic density profiles that depend on the axial mode of SHW are observed. The standing wave ratio decreases with L , and travelling helicon waves dominate the plasma production for L 〉 26 cm. The measured results are compared with a two-dimensional wave calculation.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.39.L429
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2000
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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