In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 36, No. 9S ( 1997-09-01), p. 5870-
Abstract:
Barium strontium titanate ( (Ba, Sr)TiO 3 ; BST) thin films were prepared on Pt-coated magnesium oxide single-crystal substrates (Pt(111)/MgO(100) and
Pt(100)/MgO(100)) at 650° C by metalorganic chemical vapor deposition (MOCVD). The BST films with a perovskite single phase were obtained. Their room-temperature
dielectric constant was 400–590 measured at 100 mV and 1 kHz. The leakage current density was below the order of 10 -7 A/cm 2 at 3 V, and the breakdown field was above
500 kV/cm. In addition, the multilayer capacitor with five layers of BST was prepared. The room-temperature capacitance with an effective electrode area of 0.16 mm 2 was
20 nF at 100 mV and 1 kHz. The leakage current was on the order of 10 -8 A at 1V, and on
order of 10 -5 A at 3 V.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.36.5870
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1997
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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