In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 30, No. 11B ( 1991-11-01), p. L1971-
Abstract:
We investigated the gas-phase reaction between trimethylamine alane (TMAA) and triethylgallium (TEG) in chemical beam epitaxy (CBE) using a quadrupole mass analyzer (QMA). When they were premixed to form a single beam, the overall intensity of the mass spectrum for the mixtures was much lower than that for each source, which was consistent with the observed growth rate of each layer. In contrast, such reduction was remarkably suppressed when they formed individual beams. These results indicated that gas-phase reaction to produce nonvolatile materials occurred in the premixing region. Therefore, premixing must be prevented during growth using TMAA and TEG.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.30.L1971
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1991
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
Permalink