In:
ECS Journal of Solid State Science and Technology, The Electrochemical Society, Vol. 12, No. 9 ( 2023-09-01), p. 094001-
Abstract:
The methionine derivative FMOC-L-Methionine (Fmoc-Met-OH) is firstly selected as a new green corrosion inhibitor for Cu film CMP in weak alkaline conditions (pH=8.5) to reduce Cu removal rate ( RR ). Fmoc-Met-OH has an excellent inhibition efficiency of 78.26% at 0.43 wt%. AFM and SEM studies show the Fmoc-Met-OH protected the Cu. The Fmoc-Met-OH adsorption behavior were simulated by MD. The inhibition layer is adsorbed on the Cu surface by S-Cu/C-Cu bond to prevent further corrosion.
Type of Medium:
Online Resource
ISSN:
2162-8769
,
2162-8777
DOI:
10.1149/2162-8777/acf2c2
Language:
Unknown
Publisher:
The Electrochemical Society
Publication Date:
2023
Permalink