Online-Ressource
Institute of Electrical and Electronics Engineers (IEEE)
;
2003
In:
IEEE Transactions on Semiconductor Manufacturing Vol. 16, No. 2 ( 2003-05), p. 138-146
In:
IEEE Transactions on Semiconductor Manufacturing, Institute of Electrical and Electronics Engineers (IEEE), Vol. 16, No. 2 ( 2003-05), p. 138-146
Materialart:
Online-Ressource
ISSN:
0894-6507
DOI:
10.1109/TSM.2003.810939
Sprache:
Englisch
Verlag:
Institute of Electrical and Electronics Engineers (IEEE)
Publikationsdatum:
2003
ZDB Id:
2035198-7
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