In:
Materials Science Forum, Trans Tech Publications, Ltd., Vol. 858 ( 2016-05-24), p. 966-969
Abstract:
Impact ionization coefficients are important material properties that determine the breakdown voltage and safe operating area of power devices. This paper presents an anisotropy breakdown model with modified parameters that reproduces well experimental results for both peak breakdown voltages and sharp drops in breakdown voltage at high junction–termination–extension (JTE) acceptor concentrations. Using a newly developed simulation model, we optimized the edge termination and current-spreading layers (CSLs) and obtained a low specific on-resistance (R ON A) of 11.6 mΩcm 2 for a breakdown voltage (BV DSS ) of approximately 4 kV and a high-avalanche-withstanding energy robustness of 4.6 Jcm - 2 .
Type of Medium:
Online Resource
ISSN:
1662-9752
DOI:
10.4028/www.scientific.net/MSF.858
DOI:
10.4028/www.scientific.net/MSF
DOI:
10.4028/www.scientific.net/MSF.858.966
Language:
Unknown
Publisher:
Trans Tech Publications, Ltd.
Publication Date:
2016
detail.hit.zdb_id:
2047372-2
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