In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 32, No. 12R ( 1993-12-01), p. 5813-
Abstract:
Freeze-drying, which is a surface-tension-free process, was applied in resist processing to avoid resist pattern collapse and the mechanism was investigated. The freeze-drying, in which tert-butylalcohol was used, prevents resist patterns from collapsing. The driving force of collapse is surface tension of the rinsing liquid.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.32.5813
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1993
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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