In:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, American Vacuum Society, Vol. 13, No. 2 ( 1995-03-01), p. 350-354
Abstract:
A scanning force microscope technique is described to study the relation between topography and the local adhesion. The drift has been a main problem in investigating this relation since a long period is required to measure force curves over the scan area. To circumvent this problem, we propose a methodology to detect the topography and the adhesion from force curves simultaneously. Since this information is obtained from the same force curve, the distribution of the tip position corresponds precisely to that of the adhesion. The detailed relation between the tip position and the adhesion is measured on a fine lithographic grating.
Type of Medium:
Online Resource
ISSN:
1071-1023
,
1520-8567
Language:
English
Publisher:
American Vacuum Society
Publication Date:
1995
detail.hit.zdb_id:
3117331-7
detail.hit.zdb_id:
3117333-0
detail.hit.zdb_id:
1475429-0
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