In:
Superconductor Science and Technology, IOP Publishing, Vol. 33, No. 11 ( 2020-11-01), p. 115002-
Abstract:
Transition-edge sensors (TESs) are thermal detectors in which a superconducting film that is electrically biased in the superconducting-to-normal transition is used as a thermometer. In most TESs, the film is a superconductor-normal metal bilayer where the two materials and their thicknesses are chosen to achieve various specifications including the transition temperature T c . Traditionally, the materials in the bilayer are deposited in sequence without breaking vacuum in order to achieve a clean, uniform bilayer interface at the wafer-scale. This approach leads to constraints in material properties, fabrication techniques and, ultimately, TES designs. To overcome these constraints, we have developed a bilayer fabrication process that allows the layers to be deposited and patterned separately with an exposure to atmosphere between the deposition steps. We demonstrate better than 6% transition-temperature uniformity across a 7.6 cm (3 in) substrate and present satisfactory spectra from TES x-ray detectors fabricated in this fashion. We show how the new hybrid additive-subtractive TES fabrication process creates new design possibilities, including broad tuning of T c across a substrate with a single bilayer thickness.
Type of Medium:
Online Resource
ISSN:
0953-2048
,
1361-6668
DOI:
10.1088/1361-6668/abb206
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2020
detail.hit.zdb_id:
1361475-7
Permalink