In:
International Journal of Automation Technology, Fuji Technology Press Ltd., Vol. 5, No. 6 ( 2011-11-05), p. 780-785
Abstract:
A piezoelectric (PZT) actuator featuring a high frequency response is employed to serve as a highfrequency dither and to compensate for the nonlinear motion characteristic of a pneumatic positioning device. To examine the function of the PZT dither, system identification based on a linear model for describing the positioning device was performed. To obtain the most suitable actuating parameters of the PZT dither, the Taguchi method was employed. Using the optimal parameters, the positioning system implemented by the PID controller was configured. For a target position of 4 mm, position control with a positioning accuracy under 0.1 µm was demonstrated. Compared to the pneumatic positioning device using a traditional controller, the device presented in this study features better positioning ability.
Type of Medium:
Online Resource
ISSN:
1883-8022
,
1881-7629
DOI:
10.20965/ijat.2011.p0780
Language:
English
Publisher:
Fuji Technology Press Ltd.
Publication Date:
2011
detail.hit.zdb_id:
2942224-3
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