In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 40, No. 5R ( 2001-05-01), p. 3431-
Abstract:
Spatial distributions of H atom density in high-density, helicon-wave H 2 plasmas were measured by (2+1)-photon laser-induced fluorescence spectroscopy. In low-power, high-pressure discharges, hill-type distributions, i.e., the H atom density in the plasma column was higher than that in the outside region, were observed. The hill-type density distribution can be explained by known mechanisms of gas-phase reactions, diffusion, and surface loss of H atoms. On the other hand, in high-power, low-pressure discharges, deep dips were observed in the spatial distribution of the H atom density. The dip region corresponded to the location of the plasma column, suggesting significant heating of H atoms.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.40.3431
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2001
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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