In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 33, No. 5B ( 1994-05-01), p. L747-
Abstract:
Sp 3 -rich amorphous hydrogenated carbon (a-C:H) films were fabricated by reactive rf magnetron sputtering in argon and hydrogen gas mixture. To clarify the bonding configuration of hydrogen (i.e., CH, CH 2 and CH 3 ) in the film, the deconvolutions of the 2900 cm -1 IR absorption spectrum for the films were examined. As a result, the relationship between the bonding hydrogen and the physical properties of the film suggests that not only the bonding hydrogen concentration but also the relative ratio between the three configurations of hydrogen must be taken into account.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.33.L747
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1994
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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