In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 44, No. 2R ( 2005-02-01), p. 1013-
Abstract:
Zirconium–titanium–oxide thin films were prepared by multi-target rf reactive sputtering using metallic targets of zirconium and titanium. The compositional ratio of zirconium to titanium in the thin films was precisely controlled through rf power. Zirconium and titanium in the thin films were found to exist as mixtures of chemically bonded ZrO 2 and TiO 2 from XPS spectra. The zirconium–titanium–oxide thin films with compositional ratio x 〈 0.42 were identified to have a tetragonal crystal structure, whereas those with x ≧0.42 were identified to be in the amorphous state. The refractive index of the zirconium–titanium–oxide thin film at a wavelength of 550 nm changed from 2.25 to 2.55 according to compositional ratio x , and the dispersion of the refractive index was analyzed using the Lorentz oscillator model with four oscillators. It was clarified that the estimated oscillator energies E 1 (10.5 eV) and E 2 (6.5 eV) correspond to zirconium oxide, and that E 3 (5.5 eV) and E 4 (4.3 eV) correspond to titanium oxide from fundamental absorption spectra and photoconductivity.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.44.1013
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2005
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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