In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 38, No. 8A ( 1999-08-01), p. L885-
Abstract:
With a spheroidal electron cyclotron resonance (ECR) surface completely
enclosed in a vacuum vessel in a simple cusp field, we can produce ECR plasmas with a peak electron
density up to n e ≃5×10 11 cm -3 at a low Ar pressure of p ≃1.5×10 -5 Torr by injection of 2.45 GHz microwave power of P in =150–400 W. The degree of
ionization reaches over 50% at this local density peak point. Such a high degree of ionization may be due to the efficient ionization
by suprathermal tail electrons ( W 〉 30 eV), which are observed in
single probe characteristics. On the other hand, at a relatively high pressure of p ≃1.5×10 -4 Torr, a flat density profile with density
nearly equal to the plasma cutoff density (7×10 10 cm -3 ) is obtained inside the ECR spheroid.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.38.L885
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1999
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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