In:
Applied Physics Letters, AIP Publishing, Vol. 97, No. 18 ( 2010-11-01)
Abstract:
We present batch-fabricated carbon-based nanomechanical resonators which are laminated by a pyrolyzed carbon layer and single-walled carbon-nanotube network (C/CNT resonators). The embedded CNT layers simultaneously enhance the electrical conductivity (∼160-fold) and mechanical stiffness (10% higher Young’s modulus) compared to nonstiffened carbon-only resonators. Dynamic behaviors of the fabricated C/CNT and carbon-only resonators, including fundamental frequency, Q-factor, and frequency tuning characteristics show comparable performance to the silicon based resonators.
Type of Medium:
Online Resource
ISSN:
0003-6951
,
1077-3118
Language:
English
Publisher:
AIP Publishing
Publication Date:
2010
detail.hit.zdb_id:
211245-0
detail.hit.zdb_id:
1469436-0
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