In:
Plasma Processes and Polymers, Wiley, Vol. 3, No. 9 ( 2006-11-17), p. 682-691
Abstract:
Summary: Emission of PFCs (perfluorocompound) has attracted much attention in recent years due to its relatively high contribution to the global warming. Non‐thermal plasma is one of the most promising technologies to effectively control the PFC emissions. In this study, a cylindrical DBD (dielectric barrier discharge) reactor is adopted for the treatment of NF 3 ‐containing streams. Besides the experimental work, a numerical model is also developed for better understanding of the reaction mechanism of NF 3 abatement in N 2 /NF 3 mixtures. Good agreement is observed between the experimental data and the simulation results. Simulation results indicate that the electrons and the N atoms are the major active species responsible for the NF 3 decomposition. In addition, N 2 (A 3 Σ ) metastables plays a significant role in the NF 3 abatement. A simplified mechanism for the NF 3 decomposition in the N 2 – NF 3 plasmas is proposed as well. Reaction mechanisms for the decomposition of NF 3 in a N 2 – NF 3 plasma. image Reaction mechanisms for the decomposition of NF 3 in a N 2 – NF 3 plasma.
Type of Medium:
Online Resource
ISSN:
1612-8850
,
1612-8869
DOI:
10.1002/ppap.200600037
Language:
English
Publisher:
Wiley
Publication Date:
2006
detail.hit.zdb_id:
2159694-3
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