In:
The Journal of the Acoustical Society of America, Acoustical Society of America (ASA), Vol. 130, No. 4_Supplement ( 2011-10-01), p. 2464-2464
Abstract:
High-intensity sound generation in air with high efficiency is usually difficult, since the acoustic impedance of air is generally much smaller than that of the transducers. In an earlier study by [H. Lee etal., J. Acoust. Soc. Am. 125, 1879-1893 (2009)], the potential for high-efficiency sound generation of a piezoelectric micromachined ultrasonic transducer (pMUT) was examined theoretically and experimentally. A thin-film transducer such as pMUT can generate sound with improved mechano-acoustic efficiency since the internal mechanical impedance of the thin-film structure can be reduced. The highly efficient characteristics of a single pMUT, however, cannot easily be used to yield high-intensity sound from pMUT array, due to variations between units in membrane size, driving voltage, and acoustic loading. In this work, a pMUT array consisting of efficient PZT uni-morph elements was designed and fabricated. The unit-to-unit variations of the pMUT array are analyzed by measuring velocity amplitude and phase of each unit transducer. The result shows that the radiated sound from pMUT array is greatly reduced due to the unit-to-unit variations of the pMUT. To eliminate the problems, uniformity control of fabrication process, optimal design of electrode pattern, and alignment method of an array pattern are considered for high-intensity sound generation.
Type of Medium:
Online Resource
ISSN:
0001-4966
,
1520-8524
Language:
English
Publisher:
Acoustical Society of America (ASA)
Publication Date:
2011
detail.hit.zdb_id:
1461063-2
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