In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 38, No. 7R ( 1999-07-01), p. 4244-
Abstract:
In fabricating microelectromechanical systems (MEMS), bulk micromachining
using (100) and (110) single crystal silicon and surface micromachining using polycrystalline silicon are most commonly used. However, both micromachining
methods have drawbacks, and fabricating actuating or sensing microdevices using single crystal silicon has been an active research topic in recent years.
The surface/bulk micromachining (SBM) process using (111) silicon, developed by us previously, allows fabricating released
structures in single crystal silicon. This paper extends the SBM process to fabricate released structures that are anchored to the substrate via mesa islands. This allows
fabricating folded-type comb drive resonators. With the extension of the SBM process developed in this paper, any microstructure fabricated by the one structural
polysilicon surface micromachining technique can also be fabricated in single crystal silicon.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.38.4244
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1999
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
Permalink