In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 30, No. 8R ( 1991-08-01), p. 1676-
Abstract:
Y-Cu-O and Ba-Cu-O layers were sequentially deposited by the plasma-controlled sputtering method and their interface structure was investigated. A binary target composed of YCuO x and BaCuO y pellets was sputtered under alternatingly varying magnetic fields to deposit films, which were supposed to consist of Y 1 Ba 0.07 Cu 1.14 and Y 0.15 Ba 1 Cu 1.13 periodic oxide layers. At deposition rates ranging between 0.13 and 0.16 nm, the formation of multilayered structures was clearly observed at a substrate temperature of 300°C and below, whereas the interface apparently diffused during the deposition to form a compositionally homogenous film at temperatures above 300°C. This thermal fluctuation at the interface was consistently interpreted in terms of a diffusion equation applied to the interface of semi-infinite solids.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.30.1676
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1991
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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