In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 33, No. 7S ( 1994-07-01), p. 4348-
Abstract:
Discharge products in SF 6 RF plasma were measured by means of direct sampling using a quadrupole mass spectrometer. In the plasma, the neutral dissociative species SF 2 and SF 4 are present. The positive ion SF 3 + is predominant, and SF 5 + , SF 2 + , SF + and F + are also present. The concentration of each neutral and ion product depends on RF power, gas flow rate and area of the silicon wafer set on the grounded electrode. When SF, SF 2 , SF + and SF 2 + increase to certain amounts, S 2 F + , SF 2 + and S + can be observed.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.33.4348
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1994
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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