In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 36, No. 8A ( 1997-08-01), p. L1029-
Kurzfassung:
The refractive indices n ⊥ ( E ⊥ c ) and n ∥ ( E ∥ c ) of the hexagonal GaN on sapphire substrates have been determined in the transparent region using the polarized reflection measurements. It is found that the difference in the refractive indices for E ⊥ c and E ∥ c is below 3% over the entire wavelength range measured, and ε ∞ , the high-frequency dielectric constant, is 5.14 for E ⊥ c and 5.31 for E ∥ c . Ellipsometry angles, Δ and Ψ, have been calculated using the results of n ⊥ , n ∥ and the thickness of the film, and an excellent agreement has been obtained between the calculated results and ellipsometric measured data.
Materialart:
Online-Ressource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.36.L1029
Sprache:
Unbekannt
Verlag:
IOP Publishing
Publikationsdatum:
1997
ZDB Id:
218223-3
ZDB Id:
797294-5
ZDB Id:
2006801-3
ZDB Id:
797295-7
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