In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, American Vacuum Society, Vol. 36, No. 5 ( 2018-09-01)
Abstract:
Zinc oxysulfide (ZnOS) is synthesized at atmospheric pressure in a laboratory-scale spatial atomic layer deposition setup by sequentially exposing the substrate to diethyl zinc and an H2O/H2S mixture, separated by a nitrogen gas curtain. The co-injection of H2O and H2S vapors in the same deposition zone enables an accurate control of the S/(O + S) ratio, the morphology, and the optoelectronic properties of the films. Next, the ZnOS deposition process is transferred to an industrial roll-to-roll spatial-ALD setup. ZnOS is applied as a buffer layer in flexible Cu(In,Ga)Se2 solar cells, instead of the commonly used CdS, achieving a best efficiency of typically 13% in small area cells (0.57 cm2) and 9.2% in flexible mini-modules (270 cm2). These results show the viability of atmospheric spatial-ALD as a new technique for roll-to-roll manufacturing of flexible photovoltaics modules based on a Cu(In,Ga)Se2 absorber.
Type of Medium:
Online Resource
ISSN:
0734-2101
,
1520-8559
Language:
English
Publisher:
American Vacuum Society
Publication Date:
2018
detail.hit.zdb_id:
1475424-1
detail.hit.zdb_id:
797704-9
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