In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 51, No. 7R ( 2012-07-01), p. 075502-
Abstract:
We have found an effective method for the evaluation of the crystal orientation of (K,Na)NbO 3 (KNN) films in the (K,Na)NbO 3 /Pt/Ti/SiO 2 /Si structure using X-ray diffraction (XRD) reciprocal space maps. Previously, the crystal structure and orientation of such (K,Na)NbO 3 films were evaluated using 2θ/θ XRD, and were considered to be the pseudocubic perovskite structure with preferential (001) orientation and no (111) orientation. Here, we applied the new method using XRD reciprocal space maps, and discovered that the (K,Na)NbO 3 films had some degree of KNN(111) orientation. We calculated the KNN(001)- and KNN(111)-orientation volume fractions for the (K,Na)NbO 3 films from the (101) diffraction peaks originating from the KNN(001)- and KNN(111)-orientation elements in the XRD reciprocal space maps, considering the calibration factors obtained from pole-figure simulations, and examined the relationship between the crystal orientation and d 31 piezoelectric coefficient in the (K,Na)NbO 3 films. The results indicated that the d 31 piezoelectric coefficient increases with increasing (001)-orientation volume fraction.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.51.075502
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2012
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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