In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 20, No. 2 ( 1981-02-01), p. L81-
Abstract:
The intrinsic resolving power of a Se-Ge inorganic photoresist is investigated using a novel fine-particle technique. Ultra-fine resolution of up to about 10 Å is confirmed. Such a high resolution exceeding the optical limit is one of the essential features of amorphous chalcogenide materials.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1981
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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