In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 36, No. 7S ( 1997-07-01), p. 4583-
Abstract:
The characterization of electron cyclotron resonance (ECR) plasma with a hollow cathode target for sputtering has been performed with a Langmuir probe. The experiments were carried out at low pressures below 1.2×10 -3 Pa at which high ionization rates over 10% were obtained. An ion current density up to 10 mA cm -2 and a target current up to 700 mA were achieved when the input microwave power was 200 W. It was found that a negative bias applied to the target causes significant changes in the spatial distributions of electron density, electron temperature and plasma potential. When a negative bias over a certain value was applied, intense coherent temporal fluctuations in the ion saturation current were observed around the radial center of the plasma column.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.36.4583
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1997
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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