In:
Chinese Journal of Lasers, Shanghai Institute of Optics and Fine Mechanics, Vol. 43, No. 6 ( 2016), p. 0603001-
Type of Medium:
Online Resource
ISSN:
0258-7025
Uniform Title:
基底晶态对HfO
2
薄膜晶向结构和力学特性的影响
DOI:
10.3788/CJL/2016/43/6
DOI:
10.3788/CJL201643.0603001
Language:
English
,
Chinese
Publisher:
Shanghai Institute of Optics and Fine Mechanics
Publication Date:
2016
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