In:
Applied Physics Letters, AIP Publishing, Vol. 97, No. 11 ( 2010-09-13)
Abstract:
Amount of neutral debris emanated from extreme ultraviolet light source must be minimized to maximize its lifetime. Emanation of neutral atomic debris was experimentally investigated using laser-induced-fluorescence technique for carbon dioxide (CO2, 10.6 μm in wavelength) and Nd-doped yttrium-aluminum-garnet (Nd:YAG, 1.064 μm) lasers irradiated tin foils. Total number of neutral atomic debris from CO2 laser-irradiated tin foils was 1/100 times smaller than that from Nd:YAG irradiated ones. Competitiveness of CO2 laser was revealed in terms of debris mitigation.
Type of Medium:
Online Resource
ISSN:
0003-6951
,
1077-3118
Language:
English
Publisher:
AIP Publishing
Publication Date:
2010
detail.hit.zdb_id:
211245-0
detail.hit.zdb_id:
1469436-0
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